Top/Back side alignment
Wafer Size up to 150 mm, Pieces down to 5 x 5 mm, Square substrate size up to 6″ x 6″
Mask Size 4”x4” up to 7″ x 7″
Exposure Source LED 450W
Wavelength Range UV400 350 – 450 nm
Resolution down to 0.8 μm
Digital camera 2X Objective 5X, 10X