III-V materials Load lock
ICP (Inductively Coupled Plasma) 1500W
RF 300W
Gases – H2, N2, O2, Ar, SF6, CH4, Cl2, BCl3, SiCl4,
Temperature range -30C to 400C
Substrate size – clamp with contact 2”, 3” and 4”
Need carrier wafer for pieces
Substrate cooling using-backside He