10 kW Solid State Electron Beam Power Supply with an EB Controller and Sweep Controller Electron beam gun with 6 pockets (15cc pocket size)
Includes an EB Gun deposition shield with motor driven rotation and lift lid.
The Inficon IC/6 Rate and Thickness Deposition Controller 8kW Heater Array
PLC Heater Power Supply Computer Control
PLC Automation Lift-off Fixturing, rotating dome
Substrate – 22 each, 100mm back loaded substrates; 9 each, 150mm back loaded substrates