Topside alignment
Light source, UV 400, 350 – 450nm
Eyepieces: 10x
Objectives: 5x, 10x, 20x
Resolution: 0.8 um
Substrate size – pieces to 2”
Mask size – 3”, 4” and 5”
MA/BA Gen4 Mask Aligner
Topside alignment
Light source, UV 400, 350 – 450nm
Eyepieces: 10x
Objectives: 5x, 10x, 20x
Resolution: 0.8 um
Substrate size – pieces to 2”
Mask size – 3”, 4” and 5”