Metrology

Profilometer Bruker Dektak XT

Scan Length Range 55mm (2in.);
150mm (6in.) with scan stitching capability Data Points Per Scan 120,000 maximum 
Max. Sample Thickness 50mm (1.95in.)
Step Height Repeatability <5Å, 1sigma on 0.1μm step
Vertical Range 1mm (0.039in.)
Vertical Resolution 1Å max. (@ 6.55μm range)10 Å @ 65.5 μm; 80 Å @ 524μm;
150 Å @ 1mm 3D capability

SOP – Dektak XT

SEM – Phenom ProX

Acc Voltage 5 – 15kV 
Resolution <10nm (BSED)
Magnification 80-150,000x 
Simultaneous Optical/Electron imaging
Sample Size – up to 32mm 
Tilt option EDS capability

SOP – PHENOM PROX SEM

Optical Microscope Nikon LV 150

4 Point Probe

Optical Microscope