Sample X/Y Stage
Motorized 150mm (6 in.) X/Y, manual leveling Sample R-Theta Stage
Motorized, continuous 360 degrees
Scan Length Range 55mm (2in.); 150mm (6in.) with scan stitching capability Data Points Per Scan 120,000 maximum
Max. Sample Thickness 50mm (1.95in.)
Step Height Repeatability <5Å, 1sigma on 0.1μm step
Vertical Range 1mm (0.039in.)
Vertical Resolution 1Å max. (@ 6.55μm range)
3D capability
Vertical Resolution (@ each range setting): 1 Å @ 6.5 μm; 10 Å @ 65.5 μm; 80 Å @ 524 μm; 150 Å @ 1mm